TY  - CONF
AU  - Pratt, Jon
AU  - Newell, David
AU  - Kramar, John
AU  - Mulholland, J
AU  - Whitenton, Eric
C2  - 2003 ASPE Winter Topical Meeting
Machines & Processes for Micro-scale & Meso-scale Fabrication, Metrology, & Assembly, Gainesville, FL, USA
DA  - 2003-01-01 00:01:00
LA  - en
PB  - 2003 ASPE Winter Topical Meeting
Machines & Processes for Micro-scale & Meso-scale Fabrication, Metrology, & Assembly, Gainesville, FL, USA
PY  - 2003
TI  - Probe-Force Calibration Experiments Using the NIST Electrostatic Force Balance
ER  -