TY  - JOUR
AU  - Koning, R
AU  - Dixson, Ronald
AU  - Fu, Joseph
AU  - Vorburger, Theodore
C2  - Measurement Science & Technology
DA  - 2000-01-01 00:01:00
LA  - en
M1  - 12
PB  - Measurement Science & Technology
PY  - 2000
TI  - The Role of Periodic Interferometer Errors in the Calibration of Capacitance Displacement Sensors for Nanometrology Applications
ER  -