TY  - JOUR
AU  - Lin, Eric
AU  - Lee, V.
AU  - Lynn, G
AU  - Wu, Wen-Li
AU  - O'Neill, M
C2  - Applied Physics Letters
DA  - 2002-07-01 00:07:00
LA  - en
M1  - 81
PB  - Applied Physics Letters
PY  - 2002
TI  - Structural Characterization of a Porous Low Dielectric Constant Thin Film With a Non Uniform Depth Profile
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851997
ER  -