TY  - JOUR
AU  - Lenhart, Joseph~undefined~undefined~undefined~undefined~undefined
AU  - Fischer, Daniel
AU  - Sambasivan, S
AU  - Lin, Eric
AU  - Wu, Wen-Li
AU  - Guerrero, Douglas
AU  - Wang, Yijun
AU  - Puligadda, R
C2  - Applied Surface Science
DA  - 2021-10-12 15:10:24
LA  - en
PB  - Applied Surface Science
PY  - 2021
TI  - Understanding Deviations in Lithographic Patterns Near Interfaces: Characterization of Antireflective Coatings (ARC) and the ARC/Resist Interface
ER  -