TY  - CONF
AU  - Lenhart, Joseph~undefined~undefined~undefined~undefined~undefined
AU  - Jones, Ronald
AU  - Lin, Eric
AU  - Soles, Christopher
AU  - Wu, Wen-Li
AU  - Fischer, Daniel
AU  - Sambasivan, S
AU  - Goldfarb, D
AU  - Angelopoulos, M
C2  - Electron, Ion, and Photon Beam Technology and Nanofabrication, International Conference | 46th | | AVS, Undefined
DA  - 2002-05-01 00:05:00
LA  - en
M1  - 20
PB  - Electron, Ion, and Photon Beam Technology and Nanofabrication, International Conference | 46th | | AVS, Undefined
PY  - 2002
TI  - Probing Surface and Bulk Chemistry in Resist Films Using Near Edge X-Ray Absorption Fine Structure
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852004
ER  -