TY  - JOUR
AU  - Lenhart, Joseph~undefined~undefined~undefined~undefined~undefined
AU  - Fischer, Daniel
AU  - Sambasivan, S
AU  - Lin, Eric
AU  - Jones, Ronald
AU  - Soles, Christopher
AU  - Wu, Wen-Li
AU  - Goldfarb, D
AU  - Angelopoulos, M
C2  - SPIE International Society for Optical Engineering
DA  - 2003-02-01 00:02:00
LA  - en
M1  - 5039
PB  - SPIE International Society for Optical Engineering
PY  - 2003
TI  - X-Ray Absorption Spectroscopy to Probe Interfacial Issues in Photolithography
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852098
ER  -