TY  - JOUR
AU  - Wang, Chengqing
AU  - Fu, Wei-En
AU  - Li, Bin
AU  - Huang, Huai
AU  - Soles, Christopher
AU  - Lin, Eric
AU  - Wu, Wen-Li
AU  - Ho, Paul
AU  - Cresswell, Michael
C2  - Thin Solid Films
DA  - 2009-03-16 00:03:00
LA  - en
M1  - 517
PB  - Thin Solid Films
PY  - 2009
TI  - Small Angle X-Ray Scattering Measurements of Spatial Dependent Linewidth in Dense Nanoline Gratings
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854130
ER  -