TY  - JOUR
AU  - Lenhart, J
AU  - Fischer, Daniel
AU  - Sambasivan, S
AU  - Lin, Eric
AU  - Jones, R
AU  - Soles, Christopher
AU  - Wu, Weida
AU  - Goldfarb, D
AU  - Angelopoulos, M
C2  - Langmuir
DA  - 2005-04-26 00:04:00
LA  - en
M1  - 21
PB  - Langmuir
PY  - 2005
TI  - X-ray absorption spectroscopy to probe surface composition and surface deprotection in photoresist films
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854243
ER  -