TY  - JOUR
AU  - Lenhart, Joseph~undefined~undefined~undefined~undefined~undefined
AU  - Jones, Ronald
AU  - Lin, Eric
AU  - Soles, Christopher
AU  - Wu, Wen-Li
AU  - Goldfarb, D
AU  - Angelopoulos, M
C2  - Journal of Vacuum Science and Technology B
DA  - 2002-01-28 00:01:00
LA  - en
M1  - 20
PB  - Journal of Vacuum Science and Technology B
PY  - 2002
TI  - A Combinatorial Methodology to Discovering the Material Factors Controlling Resist Line Edge Roughness, Shape, and Critical Dimension
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852808
ER  -