TY  - JOUR
AU  - Tsvetkov, Denis
AU  - Melnik, Y
AU  - Davydov, Albert
AU  - Shapiro, Alexander
AU  - Kovalenkov, O
AU  - Lam, J
AU  - Song, J
C2  - Physica Status Solidi A-Applications and Materials Science
DA  - 2001-11-01 00:11:00
LA  - en
M1  - 188
PB  - Physica Status Solidi A-Applications and Materials Science
PY  - 2001
TI  - Growth of Submicron AlGaN/GaN/AlGaN Heterostructures by Hydride Vapor Phase Epitaxy (HVPE)
ER  -