TY  - CONF
AU  - Baklanov, M
AU  - Kondoh, E
AU  - Lin, Eric
AU  - Gidley, D
AU  - Lee, V.
AU  - Mogilnikov, K
AU  - Sun, J
C2  - Proc. of the Intl. Interconnect Technology Conf, Undefined
DA  - 2001-01-01 00:01:00
LA  - en
PB  - Proc. of the Intl. Interconnect Technology Conf, Undefined
PY  - 2001
TI  - Comparative Study of Porous SOG Films with Different Non-Destructive Instrumentation
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853742
ER  -