TY - CONF AU - Sanabia, J AU - Goldie, S AU - Ratliff, L AU - Goldner, Lori AU - Gillaspy, John C2 - International Conference on the Application of Accelerators in Research and Industry|17th|Application of Accelerators in Research and Industry: Seventeenth International Conference on the Application of Accelerators in Research and Industry, Undefined DA - 2003-08-01 00:08:00 LA - en M1 - 680 PB - International Conference on the Application of Accelerators in Research and Industry|17th|Application of Accelerators in Research and Industry: Seventeenth International Conference on the Application of Accelerators in Research and Industry, Undefined PY - 2003 TI - Highly Charged Ion Bombardment of Silicon Surfaces ER -