TY  - JOUR
AU  - Materer, N
AU  - Goodman, R
AU  - Leone, S
C2  - Journal of Vacuum Science and Technology B
DA  - 2000-01-01 00:01:00
LA  - en
M1  - 18
PB  - Journal of Vacuum Science and Technology B
PY  - 2000
TI  - Temperature Dependence of Neutral and Positively Charged Si and SiCl Etch Products During Argon-Ion-Enhanced Etching of Si(100) by Cl<sub>2</sub>
ER  -