TY  - CONF
AU  - Slaughter, J
AU  - Kearney, D
AU  - Schulze, C
AU  - Falco, C
AU  - Hills, C
AU  - Saloman, Edward
AU  - Watts, R
C2  - Polarimetry and Projection Lithography Meeting , San Diego, CA, USA
DA  - 1991-01-01 00:01:00
LA  - en
PB  - Polarimetry and Projection Lithography Meeting , San Diego, CA, USA
PY  - 1991
TI  - Interfaces in Mo/Si Multilayers, ed. by R.B. Hoover and A.B.C. Walker Jr.
ER  -