TY  - JOUR
AU  - Dragnea, B
AU  - Preusser, Jan
AU  - Szarko, J
AU  - Leone, S
AU  - Hinsberg, W
C2  - Journal of Vacuum Science and Technology B
DA  - 2001-01-01 00:01:00
LA  - en
M1  - 19
PB  - Journal of Vacuum Science and Technology B
PY  - 2001
TI  - Pattern characterization of deep-ultraviolet photoresists by near-field infrared microscopy
ER  -