TY - CONF AU - Ukraintsev, Vladimir AU - Orji, Ndubuisi AU - Vorburger, Theodore AU - Dixson, Ronald AU - Fu, Joseph AU - Silver, Richard C2 - Metrology, Inspection, and Process Control for Microlithography XXVI, Proceedings of SPIE Volume: 8324, San Jose, CA, US DA - 2012-04-09 00:04:00 LA - en PB - Metrology, Inspection, and Process Control for Microlithography XXVI, Proceedings of SPIE Volume: 8324, San Jose, CA, US PY - 2012 TI - On CD-AFM bias related to probe bending UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=910903 ER -