TY  - JOUR
AU  - Avramov-Zamurovic1, Svetlana
AU  - Dagalakis, Nicholas
AU  - Lee, Rae
AU  - Yoo, Jae
AU  - Yang, Seung
C2  - IEEE Transactions on Instrumentation and Measurement
DA  - 2011-07-01 00:07:00
LA  - en
M1  - 60
PB  - IEEE Transactions on Instrumentation and Measurement
PY  - 2011
TI  - Embedded Capacitive Displacement Sensor for Nanopositioning Applications
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=907248
ER  -