TY  - JOUR
AU  - Peri, Someswara
AU  - Akgun, Bulent
AU  - Satija, Sushil
AU  - Jiang, Hao
AU  - Enlow, Jesse
AU  - Bunning, Timothy
AU  - Foster, Mark
C2  - ACS Applied Materials and Interfaces
DA  - 2011-08-29 00:08:00
LA  - en
M1  - 3
PB  - ACS Applied Materials and Interfaces
PY  - 2011
TI  - Control of Interface Nanoscale Structure Created by Plasma-Enhanced Chemical Vapor Deposition
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905520
ER  -