TY - CONF AU - Knuffman, Brenton AU - Steele, Adam AU - Orloff, Jon AU - Maazouz, Mostafa AU - McClelland, Jabez C2 - Frontiers of Characterization and Metrology for Nanoelectronics, Grenoble, FR DA - 2011-11-10 00:11:00 LA - en M1 - 1395 PB - Frontiers of Characterization and Metrology for Nanoelectronics, Grenoble, FR PY - 2011 TI - MOTIS: A Focused Ion Beam Source Based On Laser-Cooled Atoms UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908476 ER -