TY  - JOUR
AU  - Patrick, Heather
AU  - Germer, Thomas
AU  - Ding, Yifu
AU  - Hyun, 
AU  - Richter, Lee
AU  - Soles, Christopher
C2  - Applied Physics Letters
DA  - 2008-12-09
LA  - en
M1  - 93
PB  - Applied Physics Letters
PY  - 2008
TI  - Scatterometry for in situ measurement of pattern reflow in nanoimprinted polymers
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=900878
ER  -