TY  - JOUR
AU  - Vaish, Amit
AU  - Krueger, Susan
AU  - Dimitriou, Michael
AU  - Majkrzak, Charles
AU  - Vanderah, David
AU  - Chen, Lei
AU  - Gawrisch, Klaus
C2  - Journal of Vacuum Science & Technology A
DA  - 2014-12-18 00:12:00
LA  - en
M1  - 33
PB  - Journal of Vacuum Science & Technology A
PY  - 2014
TI  - Enhancing the Platinum Atomic Layer Deposition Infiltration Depth inside Anodic Alumina Nanoporous Membrane
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=916571
ER  -