TY - CONF AU - Brown, J. AU - Wallis, Thomas AU - Kabos, Pavel AU - Bertness, Kristine AU - Sanford, Norman AU - Bright, Victor C2 - Digest of the Transducers 2013 Conference, Barcelona, ES DA - 2013-06-16 00:06:00 LA - en PB - Digest of the Transducers 2013 Conference, Barcelona, ES PY - 2013 TI - Radio-Frequency and DC Electrical Characterization on a Modular MEMS Mechanical Test Platform for Nanomaterials ER -