TY  - CONF
AU  - Scott, J
AU  - Windsor, Eric
AU  - Brady, D
AU  - Canterbury, J
AU  - Karamcheti, A.
AU  - Chism, W
AU  - Diebold, A
C2  - Characterization and Metrology for ULSI Technology Conference, xxxx, US
DA  - 2000-01-01 00:01:00
LA  - en
M1  - 550
PB  - Characterization and Metrology for ULSI Technology Conference, xxxx, US
PY  - 2000
TI  - Gate Dielectric Thickness Metrology Using Transmission Electron Microscopy
ER  -