TY  - JOUR
AU  - Robertson, L
AU  - Law, M
AU  - Jones, K.
AU  - Rubin, L
AU  - Jackson, J
AU  - Chi, P
AU  - Simons, David
C2  - Applied Physics Letters
DA  - 1999-12-01 00:12:00
LA  - en
M1  - 75
PB  - Applied Physics Letters
PY  - 1999
TI  - Correlation of End-of-Range Damage Evolution and Transient Enhanced Diffusion of Boron in Regrown Silicon
ER  -