TY  - JOUR
AU  - Entley, W
AU  - Langan, J
AU  - Felker, B
AU  - Sobolewski, Mark
C2  - Journal of Applied Physics
DA  - 1999-11-01 00:11:00
LA  - en
M1  - 86
PB  - Journal of Applied Physics
PY  - 1999
TI  - Optimizing Utilization Efficiencies in Electronegative Discharges: The Importance of the Impedance Phase Angle
ER  -