TY  - CONF
AU  - Kopanski, Joseph
AU  - Marchiando, Jay
AU  - Albers, John
AU  - Rennex, Brian
C2  - Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA
DA  - 1998-07-01 00:07:00
LA  - en
PB  - Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA
PY  - 1998
TI  - Comparison of Measured and Modeled Scanning Capacitance Microscopy Images Across P-N Junctions
ER  -