TY  - CONF
AU  - Zincke, C.
AU  - Gaitan, Michael
AU  - Zaghloul, Mona
AU  - Linholm, Loren
C2  - Proc., IEEE 1994 Conference on Microelectronic Test Structures, San Diego, CA, USA
DA  - 1994-12-31 00:12:00
LA  - en
PB  - Proc., IEEE 1994 Conference on Microelectronic Test Structures, San Diego, CA, USA
PY  - 1994
TI  - Test Structures for Determining Design Rules for Microelectromechanical-Based Sensors and Actuators
ER  -