TY  - CONF
AU  - Gaitan, Michael
AU  - Parameswaran, A.
AU  - Zaghloul, Mona
AU  - Cassard, Janet
AU  - Novotny, Donald
AU  - Suehle, John
C2  - Proc., 35th Midwest Symposium on Circuits and Systems, Washington, DC, USA
DA  - 1992-12-31 00:12:00
LA  - en
PB  - Proc., 35th Midwest Symposium on Circuits and Systems, Washington, DC, USA
PY  - 1992
TI  - Design Methodology for Micromechanical Systems at Commercial CMOS Foundries Through MOSIS
ER  -