TY  - JOUR
AU  - Kopanski, Joseph
AU  - Marchiando, Jay
AU  - Berning, David
AU  - Alvis, R.
AU  - Smith, H.
C2  - Journal of Vacuum Science and Technology
DA  - 1998-01-01 00:01:00
LA  - en
PB  - Journal of Vacuum Science and Technology
PY  - 1998
TI  - Scanning Capacitance Microscopy Measurement of 2-D Dopant Profiles Across Junctions
ER  -