TY  - CONF
AU  - Cresswell, Michael
AU  - Sniegowski, J.
AU  - Ghoshtagore, Rathindra
AU  - Allen, Richard
AU  - Linholm, Loren
AU  - Villarrubia, John
C2  - Proc. Intl. Soc. for Optical Engineering (SPIE), The International Society for Optical Engineering, Microlithography Metrology, Inspection and Process Control for Microlithography X, Bellingham, WA, USA
DA  - 1996-12-31 00:12:00
LA  - en
M1  - 2725
PB  - Proc. Intl. Soc. for Optical Engineering (SPIE), The International Society for Optical Engineering, Microlithography Metrology, Inspection and Process Control for Microlithography X, Bellingham, WA, USA
PY  - 1996
TI  - Electrical Test Structures Replicated in Silicon-on-Insulator Material
ER  -