TY - SER AU - Kopanski, Joseph AU - Thurber, W. AU - Chun, Melissa C2 - Electrochemical Society, Pennington, NJ DA - 2006-07-01 00:07:00 LA - en PB - Electrochemical Society, Pennington, NJ PY - 2006 TI - Characterization of the silicon dioxide-silicon interface with the scanning capacitance microscope ER -