TY  - JOUR
AU  - Sauvageau, J.
AU  - Booi, P.
AU  - Cromar, M.
AU  - Benz, Samuel
AU  - Burroughs, Charles
AU  - Koch, Jonathan
C2  - IEEE Transactions on Applied Superconductivity
DA  - 1995-06-01 00:06:00
LA  - en
M1  - 5
PB  - IEEE Transactions on Applied Superconductivity
PY  - 1995
TI  - Superconducting Integrated Circuit Fabrication Process Utilizing Low Temperature ECR-Based PECVD SiO<sub>2</sub> Dielectric Films
ER  -