TY  - CONF
AU  - Vahakangas, J.
AU  - Lahti, Markku
AU  - Chang, M
AU  - Edward, H
AU  - Machala, C
AU  - Martin, R
AU  - Zavyalov, V
AU  - McMurray, J
AU  - Williams, C.
AU  - DeWolf, P
C2  - Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA
DA  - 1998-12-31 00:12:00
LA  - en
PB  - Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA
PY  - 1998
TI  - Dopant Characterization Round-Robin Study Performed on Two-Dimensional Test Structures Fabricated at Texas Instruments
ER  -