TY  - CONF
AU  - Thompson, P
AU  - Silvestre, C
AU  - Twigg, M
AU  - Jernigan, G
AU  - Simons, David
C2  - Materials Research Society Symposium, none, PA
DA  - 1998-12-01 00:12:00
LA  - en
PB  - Materials Research Society Symposium, none, PA
PY  - 1998
TI  - The Formation of Abrupt n+ Doping Profiles Using Atomic Hydrogen and Sb During Si MBE
ER  -