TY  - CONF
AU  - Lee, Myongjai
AU  - Cheng, Jen-Hau
AU  - Bertness, Kristine
AU  - Sanford, Norman
AU  - Seghete, Dragos
AU  - George, Steven
AU  - Lee, Y.C.
C2  - Transducers 2009, Denver, CO, US
DA  - 2009-06-20 00:06:00
LA  - en
PB  - Transducers 2009, Denver, CO, US
PY  - 2009
TI  - Atomic layer deposition enabled interconnect technology for vertical nanowire array devices
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902321
ER  -