TY  - CONF
AU  - Shulver, Byron
AU  - Bunting, Andrew
AU  - Gundlach, Alan
AU  - Haworth, Les
AU  - Ross, Alan
AU  - Smith, A.
AU  - Snell, Anthony
AU  - Stevenson, J.
AU  - Walton, Anthony
AU  - Cresswell, Michael
AU  - Allen, Richard
C2  - 2007 International Conference on Microlectronic Test Structures, Tokyo, 1, JA
DA  - 2007-03-22 00:03:00
LA  - en
PB  - 2007 International Conference on Microlectronic Test Structures, Tokyo, 1, JA
PY  - 2007
TI  - Extraction of Sheet Resistance and Linewidth from All-Copper ECD Test-Structures Fabricated from Silicon Preforms
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32582
ER  -