TY  - JOUR
AU  - Sayan, Safak
AU  - Chandler-Horowitz, Deane
AU  - Nguyen, Nhan
AU  - Ehrstein, James
C2  - Journal of Vacuum Science and Technology A
DA  - 2008-03-03 00:03:00
LA  - en
M1  - 26
PB  - Journal of Vacuum Science and Technology A
PY  - 2008
TI  - High Sensitivity Attenuated Total Reflection Fourier Transform Infrared Spectroscopy Study of Ultrathin ZrO2 Films: A Study of Phase Change
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32977
ER  -