TY  - CONF
AU  - Nguyen, Nhan
AU  - Han, Jin-Ping
AU  - Cho, Yong
AU  - Zhu, Wenjuan
AU  - Luo, Zhijiong
AU  - Ma, T
C2  - Characterization and Metrology for ULSI Technology: 2003, Austin, TX, US
DA  - 2003-09-30 00:09:00
LA  - en
PB  - Characterization and Metrology for ULSI Technology: 2003, Austin, TX, US
PY  - 2003
TI  - Optical properties of Jet-Vapor-Deposited TiAlO and HfAlO Determined by Vacuum Utraviolet Spectroscopic Elliposmetry
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31379
ER  -