TY  - CONF
AU  - Suehle, John
AU  - Vogel, Eric
AU  - Edelstein, Monica
AU  - Richter, Curt
AU  - Nguyen, Nhan
AU  - Levin, Igor
AU  - Kaiser, Debra
AU  - Wu, Hanchang
AU  - Bernstein, J
C2  - Proc., 2001 International Symposium on Plasma and Process-Induced Damage, Monterey, CA, USA
DA  - 2001-05-13 00:05:00
LA  - en
PB  - Proc., 2001 International Symposium on Plasma and Process-Induced Damage, Monterey, CA, USA
PY  - 2001
TI  - Challenges of High-[kappa] Gate Dielectrics for Future MOS Devices
ER  -