TY  - CONF
AU  - Cresswell, Michael
AU  - Gaitan, Michael
AU  - Allen, Richard
AU  - Linholm, Loren
C2  - Proc., IEEE International Conference on Microelectronic Test Structures, Kyoto, 1, JA
DA  - 1991-12-31 00:12:00
LA  - en
M1  - 4
PB  - Proc., IEEE International Conference on Microelectronic Test Structures, Kyoto, 1, JA
PY  - 1991
TI  - A Modified Sliding Wire Potentiometer Test Structure for Mapping Nanometer-Level Distances
ER  -