TY  - GEN
AU  - Cresswell, Michael
AU  - Allen, Richard
AU  - Dixson, Ronald
AU  - Guthrie, William
AU  - Murabito, Christine
AU  - Park, Brandon
AU  - Martinez, Joaquin
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2005-03-02 00:03:00
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2005
TI  - Report of Investigation of RM 8111: Single-Crystal Critical Dimension Prototype Reference Materials
ER  -