TY  - CONF
AU  - Cresswell, Michael
AU  - Dixson, Ronald
AU  - Guthrie, William
AU  - Allen, Richard
AU  - Murabito, Christine
AU  - Park, Brandon
AU  - Martinez, Joaquin
AU  - Hunt, Amy
C2  - SPIE 30th International Symposium Microlithography, San Jose, CA, USA
DA  - 2005-05-30 00:05:00
LA  - en
M1  - 5752
PB  - SPIE 30th International Symposium Microlithography, San Jose, CA, USA
PY  - 2005
TI  - Critical Dimension Reference Features with Sub-Five Nanometer Uncertainty
ER  -