TY  - CONF
AU  - Cresswell, Michael
AU  - Bonevich, John
AU  - Headley, T
AU  - Allen, Richard
AU  - Giannuzzi, Lucille
AU  - Everist, Sarah
AU  - Ghoshtagore, Rathindra
AU  - Shea, Patrick
C2  - SPIE - The International Society for Optical Engineering, Gaithersburg, MD, USA
DA  - 2000-06-01 00:06:00
LA  - en
M1  - 3998
PB  - SPIE - The International Society for Optical Engineering, Gaithersburg, MD, USA
PY  - 2000
TI  - Comparison of Electrical CD Measurements and Cross-Section Lattice-Plane Counts of Sub-Micrometer Features Replicated in (100) Silicon-on-Insulator Material
ER  -