TY - JOUR AU - Sayan, Safak AU - Chandler-Horowitz, Deane AU - Nguyen, Nhan AU - Ehrstein, James AU - Croft, Mark C2 - Journal of Vacuum Science and Technology A DA - 2008-02-12 00:02:00 LA - en M1 - 26 PB - Journal of Vacuum Science and Technology A PY - 2008 TI - High Sensitivity FTIR-ATR Study of Ultra-Thin Zr02 Films: A Study of Phase Change UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32303 ER -