TY - CONF AU - Huang, Huai AU - Li, Bin AU - Zhao, Qiu AU - Luo, Zhiquan AU - Im, Jay AU - Kang, Min AU - Allen, Richard AU - Cresswell, Michael AU - Huang, Rui AU - Ho, Paul C2 - 10th international workshop on stress-Induced Phenomena in metallization, Austin, TX, US DA - 2009-09-18 00:09:00 LA - en PB - 10th international workshop on stress-Induced Phenomena in metallization, Austin, TX, US PY - 2009 TI - Nanoindentation of Si Nanostructures: Buckling and Friction at Nanoscales UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902683 ER -