TY  - CONF
AU  - Meyer, Christopher
AU  - DeWitt, D
AU  - Kreider, Kenneth
AU  - Lovas, Francis
AU  - Tsai, Benjamin
C2  - Characterization and Metrology for ULSI Technology, International Conference | | | American Institute of Physics
DA  - 2001-06-01
LA  - en
M1  - No. 550
PB  - Characterization and Metrology for ULSI Technology, International Conference | | | American Institute of Physics
PY  - 2001
TI  - ITS-90 Calibration of Radiation Thermometers for RTP Using Wire/Thin-Film Thermocouples on a Wafer
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=830687
ER  -