TY - JOUR AU - Li, Bin AU - Kang, Min AU - Lu, Kuan AU - Huang, Rui AU - Ho, Paul AU - Allen, Richard AU - Cresswell, Michael C2 - Nano Letters DA - 2007-12-07 00:12:00 LA - en M1 - 8 PB - Nano Letters PY - 2007 TI - Fabrication and Characterization of Patterned Single-Crystal Silicon Nanolines UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32747 ER -