TY  - JOUR
AU  - Vorburger, Theodore
AU  - Song, Jun-Feng
AU  - Giauque, T
AU  - Renegar, Thomas
AU  - Whitenton, Eric
AU  - Croarkin, M
C2  - Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
DA  - 1996-10-01 00:10:00
LA  - en
M1  - 19(2-3)
PB  - Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
PY  - 1996
TI  - Stylus-Laser Surface Calibration System
ER  -