TY  - CONF
AU  - Tsai, V
AU  - Vorburger, Theodore
AU  - Sullivan, P
AU  - Dixson, Ronald
AU  - Silver, Richard
AU  - Williams, Edwin
AU  - Schneir, J
C2  - Proceedings of American Society for Precision Engineering, Unknown, 1, USA
DA  - 1996-01-01 00:01:00
LA  - en
M1  - 14
PB  - Proceedings of American Society for Precision Engineering, Unknown, 1, USA
PY  - 1996
TI  - Height Calibration of Atomic Force Microscopes Using Silicon Atomic Step Artifacts
ER  -