TY - CONF AU - Pratt, Jon AU - Kramar, John AU - Shaw, Gordon AU - Smith, Douglas AU - Moreland, John C2 - 2007 Materials Research Society Spring Meeting, San Francisco, CA, USA DA - 2007-04-08 00:04:00 LA - en PB - 2007 Materials Research Society Spring Meeting, San Francisco, CA, USA PY - 2007 TI - A Piezoresistive Cantilever Force Sensor for Direct AFM Force Calibration UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822731 ER -